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Promise and challenge of DUV speckle interferometry

Author(s):
Aswendt, P. ( Fraunhofer-Institut fuer Werkzeugmaschinen und Umformtechnik (Germany) )  
Publication title:
Speckle metrology 2003 : 18-20 June 2003, Trondheim, Norway
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4933
Pub. Year:
2003
Page(from):
117
Page(to):
122
Pages:
6
Pub. info.:
Bellingham, Wash: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447289 [0819447285]
Language:
English
Call no.:
P63600/4933
Type:
Conference Proceedings

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