Deposition of Pb(Zr XTi1-X )03 thin films by pulsed laser ablation for MEMS application

Deposition of Pb(Zr XTi1-X )03 thin films by pulsed laser ablation for MEMS application

Author(s):

Wang, Z.-J. ( Tohoku Univ. (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Kokawa, H. ( Tohoku Univ. (Japan) )

Publication title:

Smart materials II : 16-18 December 2002, Melbourne, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4934

Pub. Year:

2002

Page(from):

356

Page(to):

363

Pages:

8

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447296 [0819447293]

Language:

English

Call no.:

P63600/4934

Type:

Conference Proceedings

Details

TDL ID:	ZA00012781
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart Materials
Conf. info. (Number):	2002 : 2nd
Conf. info. (Venue):	Melbourne, Australia
Conf. info. (Date):	2002.12.16-2002.12.18

Similar Items:

1 Conference Proceedings In situ deposition of epitaxial PZT films by pulsed laser deposition Wang, Z. J., Yan, L. J., Kokawa, H., Maeda, R. SPIE - The International Society of Optical Engineering	7 Conference Proceedings DEPOSITION OF HIGH TC SUPERCONDUCTOR THIN FILMS BY PULSED LASER ABLATION Mashburn, D. N., Geohegan, D. B., Eres, D., Lowndes, D. H., Boatner, L. A., Sales, B. C., Pennycook, S. J., Culbertson, … Materials Research Society
2 Conference Proceedings Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application Z. J. Wang, H. Kokawa, H. Takizawa, M. Ichiki, R. Maeda SPIE - The International Society of Optical Engineering	8 Conference Proceedings Optical Waveguiding (Pb,La)(Zr,Ti)O3 Thin Films Prepared by Pulsed Laser Deposition Xiong, S. B., Liu, Z. G., Chen, X. Y., Guo, X. L., Yu, T., Zhu, S. N., Liu, X., Luo, W. G. MRS - Materials Research Society
3 Conference Proceedings Deposition of PZT thin films by pulsed laser ablation for MEMS application Maeda,R., Kikuchi,K.M., Schroth,A., Umezawa,A., Masumoto,S. SPIE-The International Society for Optical Engineering	9 Conference Proceedings GROWTH AND PROPERTIES OF Pb(Mg1/3Nb2/3)O3 - PbTiO3 AND Pb(ZR, Ti)O3 THIN FILMS BY PULSED LASER DEPOSITION Safari A., Tantigate C., Lee J. Kluwer Academic Publishers
4 Conference Proceedings Preparation of PZT films derived by hybrid processing for MEMS application Yan, L., Wang, Z.J.M., Kokawa, H., Maeda, R. SPIE - The International Society of Optical Engineering	10 Conference Proceedings TEA CO2 laser ablation deposition and subsequent heat treatment of Fe and Zr thin film systems Hayes,J.P., Snelling,H.V., Sands,D., Jenner,A.G., Greenough,R.D. SPIE-The International Society for Optical Engineering
5 Conference Proceedings "Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS" Maeda,R., Wang,Z., Chu,J., Lin,W. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition Ichiki,M., Zhang,L., Wang,Z., Morikawa,Y., Tanaka,M., Maeda,R. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators Wang,Z.-J., Maeda,R., Hokawa,H. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation Zhang, L., Ichiki, M., Wang, Z.-J., Maeda, R. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12