Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Author(s):

Zhang, L. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Ichiki, M.
Wang, Z.-J. ( Tohoku Univ. (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )

Publication title:

Smart materials II : 16-18 December 2002, Melbourne, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4934

Pub. Year:

2002

Page(from):

30

Page(to):

37

Pages:

8

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447296 [0819447293]

Language:

English

Call no.:

P63600/4934

Type:

Conference Proceedings

Details

TDL ID:	ZA00012781
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart Materials
Conf. info. (Number):	2002 : 2nd
Conf. info. (Venue):	Melbourne, Australia
Conf. info. (Date):	2002.12.16-2002.12.18

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