Real-time far distance microvibration measurement using an external cavity semiconductor laser interferometer with a feedback control system
- Author(s):
- Zhao, W.R. ( Institute of Semiconductors (China) )
- Jiang, P.F.
- Xie, F.Z.
- Publication title:
- Optical design and testing : 15-18 October 2002, Shanghai, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4927
- Pub. Year:
- 2002
- Page(from):
- 770
- Page(to):
- 774
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447166 [0819447161]
- Language:
- English
- Call no.:
- P63600/4927
- Type:
- Conference Proceedings
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