Surface roughness measurement using infrared phase-shifting digital interferometer

Surface roughness measurement using infrared phase-shifting digital interferometer

Author(s):

He, Y. ( Nanjing Univ. of Science and Technology (China) )
Chen, L.
Wang, Q.
Chen, J.B.

Publication title:

Optical design and testing : 15-18 October 2002, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4927

Pub. Year:

2002

Page(from):

170

Page(to):

176

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447166 [0819447161]

Language:

English

Call no.:

P63600/4927

Type:

Conference Proceedings

Details

TDL ID:	ZA00012776
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Optical Design and Testing
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.15-2002.10.18

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