New-style defect inspection system of film

New-style defect inspection system of film

Author(s):

Liang, Y. ( Tianjin Univ. (China) )
Liu, W.Y.
Liu, M.
Lee, R.G. ( North China Research Institute of Electro-optics )

Publication title:

Optical manufacturing technologies : 17-18 October 2002, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4921

Pub. Year:

2002

Page(from):

89

Page(to):

96

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447104 [0819447102]

Language:

English

Call no.:

P63600/4921

Type:

Conference Proceedings

Details

TDL ID:	ZA00012770
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Optical Manufacturing Technologies
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.17-2002.10.18

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