Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control

Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control

Author(s):

Cheng, S.-W. ( Zhejiang Univ. (China) )
Zhang, H.-J.
Wang, X.-J.

Publication title:

Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4919

Pub. Year:

2002

Page(from):

393

Page(to):

400

Pages:

8

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447081 [0819447080]

Language:

English

Call no.:

P63600/4919

Type:

Conference Proceedings

Details

TDL ID:	ZA00012768
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Advanced materials and devices for sensing and imaging
Conf. info. (Number):	2002
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2002.10.17-2002.10.18

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