New nanoporous low-dielectric-constant material for TFT passivation
- Author(s):
- Lin, S.-S. ( Industrial Technology Research Institute (Taiwan China) )
- Lee, R.-J.
- Publication title:
- Materials, Devices, and Systems for Display and Lighting
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4918
- Pub. Year:
- 2002
- Page(from):
- 294
- Page(to):
- 302
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447074 [0819447072]
- Language:
- English
- Call no.:
- P63600/4918
- Type:
- Conference Proceedings
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