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Influence on the film properties of torch inclination angle in the FHD process

Author(s):
Seo, Y.-G. ( Korea Electronics Technology Institute )
Shin, S.-H. ( SemiTel Co., Ltd. (Korea) )
Kwon, O.-D.
Lee, B.-M.
Kim, Y.-T. ( Sungkyunkwan Univ. (Korea) )
Yoon, D.-H.
Yoon, H.-D. ( Korea Electronics Technology Institute )
Im, Y.-M.
3 more
Publication title:
Optical fiber and planar waveguide technology II : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 16-18 October 2002, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4904
Pub. Year:
2002
Page(from):
359
Page(to):
362
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446930 [0819446939]
Language:
English
Call no.:
P63600/4904
Type:
Conference Proceedings

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