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Experimental and numerical studies of the response of photomask hard pellicles to acoustic excitation

Author(s):
Cotte, E.P. ( Univ. of Wisconsin/Madison (USA) )
Reu, P.L.
Engeistad, R.L.
Lovell, E.G.
Grenville, A. ( International SEMATECH (USA) )
Van Peski, C.K.
1 more
Publication title:
22nd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4889
Pub. Year:
2002
Vol.:
Part Two
Page(from):
1121
Page(to):
1132
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446756 [0819446750]
Language:
English
Call no.:
P63600/4889
Type:
Conference Proceedings

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