Fogging effect consideration in mask process at 50-KeV e-beam systems
- Author(s):
Yang, S.-H. ( Samsung Electronics Co., Ltd. (South Korea) ) Choi, Y.-H. Park, J.-R. Kim, Y.-H. Choi, S.-W. Yoon, H.-S. Sohn, J.-M. - Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 786
- Page(to):
- 791
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Proximity effect correction optimization considering fogging and loading effects compensation
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Analysis of dose modulation method for fogging effect correction at 50-KeV e-beam system
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Dose-modulation-induced mask CD error on simultaneous correction of fogging and loading effect
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Evaluation of process capabilities for 50 keV with rectangular-shaped beam using computer simulation
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Simple method for separating and evaluating origins of a side error in mask CD uniformity: photomask blanks and mask-making processes
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |