Improvement of NLD mask dry etching system for 100-nm-node technology

Improvement of NLD mask dry etching system for 100-nm-node technology

Author(s):

Tanaka, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )

Yoshioka, N.

Harashima, N. ( ULVAC Coating Corp. (Japan) )

Sasaki, T.

Kuwahara, K. ( ULVAC Inc. (Japan) )

Hayashi, T.

Hara, M. ( HOYA Corp. (Japan) )

Ohkubo, Y.

3 more

Publication title:

22nd Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4889

Pub. Year:

2002

Vol.:

Part One

Page(from):

619

Page(to):

625

Pages:

7

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446756 [0819446750]

Language:

English

Call no.:

P63600/4889

Type:

Conference Proceedings

Details

TDL ID:	ZA00012736
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2002 : 22nd
Conf. info. (Venue):	Monterey, California, USA
Conf. info. (Date):	2002.10.011-2002.10.04

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