Optimizing etch uniformity for alternating aperture phase-shift masks on Etec Systems Tetra photomask etch system
- Author(s):
- Waheed, N.L. ( Photronics Inc. (USA) )
- Brooks, C.B. ( Etec Systems, Inc., An Applied Materials Co. (USA) )
- Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 592
- Page(to):
- 598
- Pages:
- 7
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Optical emission endpoint optimization in the tetra etch chamber for production of embedded phase-shift photomasks
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Optimization of chrome dry etch in Tetra II using asymmetrically loaded patterns
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Evalution of 193-nm alternating-aperture phase-shift mask dry etch processes
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Characteristics of RIE lag and pattern density effect in alternating aperture phase-shift masks [5992-126]
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Plasma etching of quartz for the fabrication of alternating aperture phase-shift photomasks: etch rate uniformity study utilizing a next-generation ICP source
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Investigation on micro-trench formation of alternating aperture phase shift masks
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Effect of quartz phase etch on 193-nm alternating phase-shift mask performance for the 100- nm node
SPIE-The International Society for Optical Engineering |