Modified shape from shading approach to SEM-based photoresist CD metrology
- Author(s):
- Ahammad, P. ( Univ. of Central Florida (USA) )
- Mukherjee, A.
- Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 365
- Page(to):
- 373
- Pages:
- 9
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Photoresist shape reconstruction from secondary scanning electron microscopy
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Waveguide sidewall roughness estimation via shape-from-shading surface reconstruction of SEM pictures
SPIE - The International Society of Optical Engineering |
ESA Communications |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |