GDS-based mask data preparation flow. Data volume containment by hierarchical data processing
- Author(s):
- Schulze, S.F. ( Mentor Graphics Corp. (USA) )
- Lacour, P.
- Buck, P.D. ( DuPont Photomasks, Inc. (USA) )
- Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 104
- Page(to):
- 114
- Pages:
- 11
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
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