Development of new stream format with GDSII upper compatibility and high compression rate
- Author(s):
Kuriyama, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Hirumi, J. Yoshioka, N. Hojo, Y. ( Hitachi High-Technologies Corp. (Japan) ) Kawase, Y. ( JEOL Ltd. (Japan) ) Hara, S. ( NuFlare Technology Inc. (Japan) ) Hoga, M. ( Dai Nippon Printing Co., Ltd. (Japan) ) Watanabe, S.W. Inoue, M. ( Seiko Instruments Inc. (Japan) ) Kawase, H. Kamimoto, T. - Publication title:
- 22nd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4889
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 83
- Page(to):
- 93
- Pages:
- 11
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446756 [0819446750]
- Language:
- English
- Call no.:
- P63600/4889
- Type:
- Conference Proceedings
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