LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer

LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer

Author(s):

Wiberg, D.V. ( Jet Propulsion Lab. (USA) )

Moore, E. ( Univ. of Southern California (USA) )

Munz, P.

2 more

Publication title:

First jet propulsion laboratory in Situ Instruments Workshop : 11-13 june 2002, Pasadena, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4878

Pub. Year:

2003

Page(from):

8

Page(to):

13

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446596 [0819446599]

Language:

English

Call no.:

P63600/4878

Type:

Conference Proceedings

Details

TDL ID:	ZA00012725
Series ID:	PA00000029
Conf. info. (Name):	Jet Propulsion Laboratory In Situ Instruments Workshop
Conf. info. (Number):	2002 : 1st
Conf. info. (Venue):	Pasadena, CA, USA
Conf. info. (Date):	2002.06.11-2002.06.13

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