Heterojunction bipolar transistor characterization using noncontact optical spectroscopy

Heterojunction bipolar transistor characterization using noncontact optical spectroscopy

Author(s):

Murtagh, M.E. ( Optical Metrology Innovations Ltd. (Ireland) )
Kelly, P.
O'Looney, B. ( National Microelectronics Research Ctr. (Ireland) )
Murphy, F.
Modreanu, M.

Publication title:

Opto-Ireland 2002: Optics and Photonics Technologies and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4876

Pub. Year:

2003

Vol.:

Part Two

Page(from):

1272

Page(to):

1282

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446572 [0819446572]

Language:

English

Call no.:

P63600/4876

Type:

Conference Proceedings

Details

TDL ID:	ZA00012723
Series ID:	PA00000029
Conf. info. (Name):	Opto-Ireland
Conf. info. (Number):	2002
Conf. info. (Venue):	Galway, Ireland
Conf. info. (Date):	2002.09.05-2002.09.06

Similar Items:

1 Conference Proceedings Optical characterization of high-k dielectrics HfO2 thin films obtained by MOCVD Modreanu, M., Hurley, P.K., O'Sullivan, B.J., O'Looney, B., Senateur, J.-P., Rousell, H., Rousell, F., Audier, M., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings Optical and Electrical Characterisation of Plasma Processed n-GaAs Murtagh, M., Herbert, P. A. F., Kelly, P. V., Crean, G. M. MRS - Materials Research Society
2 Conference Proceedings Nondestructive Characterization of Heterojunction Bipolar Transistors Smith, Patricia B., Duncan, Walter M., Allerman, Andrew A., Kim, Tae S. Electrochemical Society	8 Conference Proceedings In-BASED OHMIC CONTACTS TO THE BASE LAYER OF GaAs-AlGaAs HETEROJUNCTION BIPOLAR TRANSISTORS Ren, F., Pearton, S. J., Hobson, W. S., Fullowan, T. R., Emerson, A. B., Yanof, A. W., Schleich, D. M. Materials Research Society
3 Conference Proceedings Characterization of AlGaAs/GaAs Heterojunction Bipolar Transistors Using Photoreflectance and Spectral Ellipsometry Smith, Patricia B., Kim, Tae S., Magel, Lissa K., Duncan, Walter M., Ley, A. Vance, Brette, Nick A. MRS - Materials Research Society	9 Conference Proceedings Characteristics of Novel InGaAsN Double Heterojunction Bipolar Transistors Li, N.Y, Chang, P C., Baca, A.G., Laroche, J.R., Ren, F, Annou, E., Sharps, P R., Hou, H.Q. Electrochemical Society
4 Conference Proceedings SiGe HETEROJUNCTION BIPOLAR TRANSISTORS Arienzo, Maurizio, Comfort, James H., Crabbe, Emmanuel F., Harame, David L., Iyer, Subramanian S., Meyerson, Bernard S., … Materials Research Society	10 Conference Proceedings Modeling of Avalanche Multiplication in Heterojunction Bipolar Transistors Flitcroft, R.M., Houston, P.A., Ng, C.M., Button, C.C. Electrochemical Society
5 Conference Proceedings SiGe heterojunction bipolar transistors on insulating substrates Hall, S., Buiu, O., Mitrovic, I.Z., Mubarek, H.A. W. El, Ashburn, P., Bain, M., Gamble, H.S., Wang, Y., Hemment, P.L.F., … Kluwer Academic Publishers	11 Conference Proceedings *GaAs HETEROJUNCTION BIPOLAR TRANSISTOR DEVICE AND IC TECHNOLOGY Kim, Michael E., Oki, Aaron K., Camou, James B., Gorman, Gary M., Umemoto, Donald K., Hafizi, Madjid E., Pawlowicz, … Materials Research Society
6 Conference Proceedings SiGe Heterojunction Bipolar Transistors on Insulator Ashburn, P., El Mubarek, H.A.W., Bonar, J.M., Redinan-White, W. Electrochemical Society	12 Conference Proceedings In-Line Characterization of Heterojunction Bipolar Transistor Base Layers by High-Resolution X-Ray Diffraction N. Duy Nguyen, R. Loo, A. Hikavyy, B. Van Daele, P. Ryan Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12