Investigation of EUV sources for 13.5-nm operation

Investigation of EUV sources for 13.5-nm operation

Author(s):

Duffy, G. ( Univ. College Dublin (Ireland) )
Cummings, A.
Dunne, P.
O'Sullivan, G.D.

Publication title:

Opto-Ireland 2002: Optics and Photonics Technologies and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4876

Pub. Year:

2003

Vol.:

Part One

Page(from):

533

Page(to):

540

Pages:

8

Pub. info.:

Belliengham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446572 [0819446572]

Language:

English

Call no.:

P63600/4876

Type:

Conference Proceedings

Details

TDL ID:	ZA00012722
Series ID:	PA00000029
Conf. info. (Name):	Opto-Ireland
Conf. info. (Number):	2002
Conf. info. (Venue):	Galway, Ireland
Conf. info. (Date):	2002.09.05-2002.09.06

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