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Liquid-phase silylation characterization of Shipley SPR500A-series resists using PRIME top-surface imaging process

Author(s):
Arshak, K.I. ( Univ. of Limerick (Ireland) )
Mihov, M.
Arshak, A.
McDonagh, D. ( Integrated Devices Technology, Inc. (USA) )
Sutton, D. ( Univ. of Limerick (Ireland) )
Newcomb, S.
Kinsella, I.J. ( Intel Ireland Ltd. (Ireland) )
2 more
Publication title:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4876
Pub. Year:
2003
Vol.:
Part One
Page(from):
525
Page(to):
532
Pages:
8
Pub. info.:
Belliengham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446572 [0819446572]
Language:
English
Call no.:
P63600/4876
Type:
Conference Proceedings

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