Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials
- Author(s):
Cheng, Y. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) ) Sugioka, K. Masuda, M. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) ) Kawachi, M. ( HOYA Continuum Corp. (Japan) ) Shihoyama, K. Toyoda, K. ( Tokyo Univ. of Science (Japan) ) Midorikawa, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) ) - Publication title:
- Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4830
- Pub. Year:
- 2003
- Page(from):
- 479
- Page(to):
- 483
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446015 [0819446017]
- Language:
- English
- Call no.:
- P63600/4830
- Type:
- Conference Proceedings
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