Laser-based technology of scanning near-field optical probe fabrication: study of kinetics and progress of measuring
- Author(s):
- Veiko, V.P. ( St. Petersburg Federal Institute of Fine Mechanics and Optics (Russia) )
- Kalachev, A.N.
- Kaporsky, L.N.
- Volkov, S.A.
- Voznesensky, N.B.
- Publication title:
- Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4830
- Pub. Year:
- 2003
- Page(from):
- 162
- Page(to):
- 172
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446015 [0819446017]
- Language:
- English
- Call no.:
- P63600/4830
- Type:
- Conference Proceedings
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