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MEMS PACKAGING TECHNIQUE USING HF VAPOR RELEASE

Author(s):
Publication title:
Proceedings : 2002 International Conference on Advanced Packaging and Systems : March 10-13, 2002, Reno Hilton Hotel, Reno, Nevada
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4828
Pub. Year:
2002
Page(from):
156
Page(to):
160
Pages:
5
Pub. info.:
Washington, DC: IMAPS
ISSN:
0277786X
ISBN:
9780930815653 [0930815653]
Language:
English
Call no.:
P63600/4828
Type:
Conference Proceedings

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