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Loss mechanisms in MEMS oscillators

Author(s):
Vignola, J.F. ( Naval Research Lab. (USA) )
Simpson, H.J. ( Naval Research Lab. (USA) )
Liu, X. ( Naval Research Lab. (USA) )
Houston, B.H. ( Naval Research Lab .(USA) )
Photiadis, D.M.
Marcus, M.
Jarzynski, J. ( Naval Research Lab. (USA) )
Ilic, B. ( Cornell Univ. (USA) )
Czaplewski, D.
Sekaric, L.
Butler, J.E. ( Naval Research Lab. (USA) )
6 more
Publication title:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 18-21 June 2002, Ancona, Italy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4827
Pub. Year:
2002
Page(from):
466
Page(to):
477
Pages:
12
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445940 [0819445940]
Language:
English
Call no.:
P63600/4827
Type:
Conference Proceedings

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