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Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography

Author(s):
Divan, R. ( Argonne National Lab. (USA) )
Mancini, D.C.
Moldovan, N.A.
Lai, B.P.
Assoufid, L.
Leonard, Q.J. ( Univ. of Wisconsin/Madison (USA) )
Cerrina, F.
2 more
Publication title:
Design and microfabrication of novel x-ray optics : 9 July 2002, Seattle, Wasington, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4783
Pub. Year:
2002
Page(from):
82
Page(to):
91
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445506 [0819445509]
Language:
English
Call no.:
P63600/4783
Type:
Conference Proceedings

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