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X-ray lenses fabricated by deep x-ray lithography

Author(s):
Publication title:
Design and microfabrication of novel x-ray optics : 9 July 2002, Seattle, Wasington, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4783
Pub. Year:
2002
Page(from):
28
Page(to):
36
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445506 [0819445509]
Language:
English
Call no.:
P63600/4783
Type:
Conference Proceedings

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