Blank Cover Image

Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation

Author(s):
Niibe, M. ( Himeji Institute of Technology (Japan) )
Mukai, M.
Tanaka, T.
Sugisaki, K. ( Associaton of Super-Advanced Electronics Technologies (Japan) )
Zhu, Y.
Gomei, Y.
1 more
Publication title:
X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4782
Pub. Year:
2002
Page(from):
204
Page(to):
211
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445490 [0819445495]
Language:
English
Call no.:
P63600/4782
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ASET development of at-wavelength phase-shifting point diffraction interferometer

Sugisaki, K., Zhu, Y., Gomei, Y., Niibe, M.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings EUV wavefront metrology system in EUVA

Hasegawa, T., Ouchi, C., Hasegawa, M., Kato, S., Suzuki, A., Sugisaki, K., Murakami, K., Saito, J., Niibe, M.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Current status of ASET-HIT EUV phase-shifting point diffraction interferometer

Gomel,Y., Sugisaki,K., Zhu,Y., Niibe,M., Watanabe,T., Kinoshita,H.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Comparisons between EUV at-wavelength metrological methods [5921-15]

Sugisaki, K., Okada, M., Zhu, Y., Otaki, K., Liu, Z., Kawakami, J., Ishii, M., Saito, J., Murakami, K., Hasegawa, M., …

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Present status of the ASET at-wavelength phase-shifting polnt diffraction interferometer

Sugisaki,K., Zhu,Y., Gomei,Y., Niibe,M., Watanabe,T., Kinoshita,H.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Study of ruthenium-capped multilayer mirror for EUV irradiation durability [6151-109]

Takase, H, Terashima, S, Gomei, Y, Tanabe, M, Watanabe, Y, Aoki, T, Murakami, K, Matsunari, S, Niibe, M, Kakutani, Y

SPIE - The International Society of Optical Engineering
4 Conference Proceedings A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU

Kakutani, Y., Niibe, M., Kakiuchi, K., Takase, H., Terashima, S., Kondo, H., Matsunari, S., Aoki, T., Gomei, Y., Fukuda, …

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry

Goldberg,K.A., Tejnil,E., Lee,S.H., Medecki,H., Attwood,D.T., Jackson,K.H., Bokor,J.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings New contamination experimental equipment in the NewSUBARU and evaluation of SIcapped multilayer mirrors using it [6151-108]

Niibe, M, Kakutani, Y, Terashima, S, Takase, H, Gomei, Y, Matsunari, S, Aoki, T, Murakami, K, Filida. Y

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Development of an EUV reflectometer using a laser plasma x-ray source

Kondo,H., Kandaka,N., Sugisaki,K., Oshino,T., Shiraishi,M., Ishiyama,W., Murakami,K.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Evaluation of contamination deposition on pinholes used in EUV at-wavelength PDI

Sugisaki, K., Hasegawa, M., Kato, S., Ouchi, C., Saito, J., Niibe, M., Suzuki, A., Murakami, K.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings EUV wavefront measurement of six-mirror optics using EWMS

K. Sugisaki, M. Okada, K. Otaki, Y. Zhu, J. Kawakami

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12