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Scattering from high-sloped surfaces using the Kirchhoff approximation

Author(s):
Bruce, N.C. ( Univ. Nacional Autonoma de Mexico )  
Publication title:
Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4780
Pub. Year:
2002
Page(from):
1
Page(to):
6
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445476 [0819445479]
Language:
English
Call no.:
P63600/4780
Type:
Conference Proceedings

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