In-process measurements of material removal in fluid jet polishing
- Author(s):
- van Brug, H. ( TNO (Netherlands) )
- Groeneveld, M. ( Technische Univ. Delft (Netherlands) )
- Booij, S.M.
- Braatm J.J.M.
- Publication title:
- Interferometry XI: Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4778
- Pub. Year:
- 2002
- Page(from):
- 243
- Page(to):
- 250
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445452 [0819445452]
- Language:
- English
- Call no.:
- P63600/4778
- Type:
- Conference Proceedings
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