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Inspection of subwavelength structures and zero-order gratings using polarization interferometry (Invited Paper)

Author(s):
Publication title:
Interferometry XI: Techniques and Analysis
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4777
Pub. Year:
2002
Page(from):
330
Page(to):
344
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445445 [0819445444]
Language:
English
Call no.:
P63600/4777
Type:
Conference Proceedings

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