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Feasibility study of manufacturing process and quality control for the new alternatingPSM structure (BACUS Best Poster)

Author(s):
Morikawa, Y. ( Dai Nippon Printing Co., Ltd. (Japan) )
Kokubo, H.
Nishiguchi, M.
Nara, M.
Totsu, Y.
Hoga, M.
Hayashi, N.
2 more
Publication title:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4764
Pub. Year:
2002
Page(from):
224
Page(to):
234
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445315 [0819445312]
Language:
English
Call no.:
P63600/4764
Type:
Conference Proceedings

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