Cleaning of low thermanl expansion materials for low-defect EUVL mask substrates
- Author(s):
- Krueger-Velthusen, E. ( Schott Lithotec AG (Germany) )
- Friemel, F.
- Aschke, L.
- Lenzen, F.
- Publication title:
- 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4764
- Pub. Year:
- 2002
- Page(from):
- 38
- Page(to):
- 40
- Pages:
- 3
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445315 [0819445312]
- Language:
- English
- Call no.:
- P63600/4764
- Type:
- Conference Proceedings
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