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Smart masks for next-generation lithography

Author(s):
Publication title:
European workshop on smart structures in engineering and technology : 21-23 May 2002, Presqu'île de Giens, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4763
Pub. Year:
2003
Page(from):
207
Page(to):
212
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445292 [0819445290]
Language:
English
Call no.:
P63600/4763
Type:
Conference Proceedings

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