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Pulsed laser deposition of Y2O3 on Si: characteristics of the interfacial layer (Invited Paper)

Author(s):
Publication title:
ALT'01 International Conference on Advanced Laser Technologies, 11-14 September, 2001, Constanta, Romania
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4762
Pub. Year:
2002
Page(from):
93
Page(to):
98
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445285 [0819445282]
Language:
English
Call no.:
P63600/4762
Type:
Conference Proceedings

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