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EUV light source and laser considerations for scalability and high-energy conversion efficiency

Author(s):
Mercer, I.P. ( Powerlase Ltd. (UK) )
Comley, A.
Davis-Ansted, S.
Egan, M.
Ellwi, S.S.
Harrison, P.
Henderson, I.
Kelly, M.
Mason, M.
Middleton, M.
Morris, I.
Parsons-Karavassilis, D.
Nowell, T.
Raven, P.
Russel, A.
Klug, D.R. ( Imperial College of Science, Technology, and Medicine (UK) )
Taylor, A.G.
12 more
Publication title:
High-Power Laser Ablation IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4760
Pub. Year:
2002
Vol.:
Part One
Page(from):
463
Page(to):
473
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445247 [081944524X]
Language:
English
Call no.:
P63600/4760
Type:
Conference Proceedings

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