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New techniques for laser micromachining MEMS devices (Invited Paper)

Author(s):
Abbott, C. ( Exitech Ltd. (UK) )
Allott, R.M.
Bann, B.
Boehlen, K.L.
Gower, M.C.
Rumsby, P.T.
Stassen Boehlen, I.
Sykes, N.
3 more
Publication title:
High-Power Laser Ablation IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4760
Pub. Year:
2002
Vol.:
Part One
Page(from):
281
Page(to):
288
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445247 [081944524X]
Language:
English
Call no.:
P63600/4760
Type:
Conference Proceedings

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