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Laser microprocessing in microelectronics, data storage, and photonics (Invited Paper)

Author(s):
Lu, Y.F. ( National Univ. of Singapore )
Song, W.D.
Ren, Z.M.
An, C.W.
Liu, D.M.
Huang, S.M.
Wang, W.J.
Hong, M.H.
Chong, T.C.
Cho, B.J.
Zeng, J.N.
Tan, C.F.
7 more
Publication title:
High-Power Laser Ablation IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4760
Pub. Year:
2002
Vol.:
Part One
Page(from):
211
Page(to):
222
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445247 [081944524X]
Language:
English
Call no.:
P63600/4760
Type:
Conference Proceedings

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