Blank Cover Image

Fractional Fourier domain filtering applied to improve image quality in photolithography

Author(s):
Zhang, Y. ( Sichuan Univ. (China) )
Du, J.
Yang, J.
Zeng, Y.
Guo, Y.
Cui, Z. ( Rutherford Appleton Lab. (UK) )
Yao, J. ( Univ. of Strathclyde (UK) )
2 more
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
755
Page(to):
759
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Simple geometry to record fractional Fourier transform hologram with holographic lens

Gao, F., Zhang, Y., Zeng, Y., Yang, J., Xie, S., Huang, X., Yao, J., Du, J., Guo, Y.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Fabrication of beam sampling grating with electron- beam direct writing

Gao, F., Zeng, Y., Xie. S., Yao. J., Guo, Y., Du, J., Cui, Z.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Multiple fractional Fourier transform holography

Zeng, Y., Zhang, Y., Gao, F., Huang, X., Guo, Y.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Overview of grey-scale photolithography for micro-optical elements fabrication

Cui, Z., Du, J., Guo, Y.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Implementation of image encoding and decoding with computer-generated hologram of fractional Fourier transform (Invited Paper)

Guo, Y.K., Zeng, Y.S., Xie, S.W., Gao, F.H., Zhu, J.H., Zhang, Y.X., Peng, Q.J., Du, J.L., Zhang, J.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Optical image superposition in the fractional Fourier transform domain

Kozlovskii, Yu. M., Shovgenyuk, M. V.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Fourier domain optical coherence tomography for imaging of biological tissues

Ma, Z., Zhu, S., Wang, R. K., Zhang, F., Yao, J.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Study of improvement of imaging quality in project photolithography with amplitude phase compound filtering

Chen, X., Kang, X., Luo, X., Shi, J.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Design of diffractive phase elements for beam shaping in the fractional Fourier transform domain

Zhang,Y., Gu,B.-Y, Dong,B.-Z., Yang,G.-Z.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Implementation of fractional Fourier transform using holographic lens

Guo,Y., Huang,Q., Du,J.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Digital implementation of fractional Fourier transform hologram

Guo, Y.K., Xie, S.W., Zeng, Y.S., Gao, F.H., Zhang, Y.X., Gao, F., Du, C.L.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Pseudochromatic encoding fractional Fourier transform rainbow hologram

Guo,Y., Huang,Q., Du,J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12