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LCD real-time mask technique for fabrication of arbitrarily shaped microstructure

Author(s):
Peng, Q. ( Sichuan Univ. (China) )
Guo, Y.
Chen, B.
Du, J.
Xiang, J.
Cui, Z. ( Rutherford Appleton Lab. (UK) )
1 more
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
748
Page(to):
754
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

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