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Environmental test bench for reliability studies: influence of the temperature on rf switches with metallic membranes

Author(s):
Lafontan, X. ( MEMScAP S.A. (France) )
Le Touze, C.
Wenk, B.
Kolesnik, I.
Pressecq, F. ( Ctr. National d'Etudes Spatiales (France) )
Perez, G.
Nicot, J.-M.
Dardalhon, M.
Rigo, S.
4 more
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
624
Page(to):
633
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

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