Low-cost thermal flow sensor for home-appliances applications
- Author(s):
Sabate, N. ( Ctr. National de Microelectronica (Spain) ) Gracia, I. Cane, C. Berganzo, J. ( IKERLAN (Spain) ) Puicorbe, J. ( Univ. de Barcelona (Spain) ) Morante, J.R. - Publication title:
- Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4755
- Pub. Year:
- 2002
- Page(from):
- 549
- Page(to):
- 555
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445186 [0819445185]
- Language:
- English
- Call no.:
- P63600/4755
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
3D deformation analysis of flow and gas sensors membranes for reliability assessment
SPIE - The International Society of Optical Engineering |
Materials Research Society |
3
Conference Proceedings
Thermal-induced stress in dielectric membranes suitable for micromechanized gas sensors
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
A reconfigurable low-cost thermal imager for unattended ground sensors [6394-27]
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Silicon-Based Microplatforms for Characterization of Nanostructured Layers with Application in Intermediate Temperature Micro Solid Oxide Fuel Cells
Materials Research Society |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Micro and nanotechnologies for the development of an integrated chromatographic system
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |