Silicon on Insulator Technology by Ion Implantation and Smart-Cut
- Author(s):
Dutt, M.B. Kumar, Rajendra Datta, P. Chowdhury, S.P. Singh, Sube Gupta, A.P. Gopal, Vishun - Publication title:
- Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001)
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4746
- Pub. Year:
- 2002
- Vol.:
- VOL-1
- Page(from):
- 641
- Page(to):
- 643
- Pages:
- 3
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445001 [0819445002]
- Language:
- English
- Call no.:
- P63600/4746
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Kluwer Academic Publishers |
3
Conference Proceedings
Swift Heavy Ion Induced Recrystallization Studies of Top Silicon Layer on Silicon-on-Insulator(SOI)Structure by Atomic Force Microscopy
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Enhancement of diffusion barrier properties of Ta by plasma immersion ion implantation
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Smart-Cut Technology: An Industrial Application of Ion-Implantation-Induced Cavities
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Synthesis and Characterization of YAG:Ce3+ Nanophosphor prepared by Flame Spray Pyrolysis
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
12
Conference Proceedings
Wettability and Nanotribological Response of Silicon Surfaces Functionalized by Ion Implantation
Trans Tech Publications |