Response of a biologically inspired MEMS differential microphone diaphragm

Response of a biologically inspired MEMS differential microphone diaphragm

Author(s):

Tan, L. ( SUNY/Binghamton (USA) )

Miles, R.N.

Weinstein, M.G. ( Charles Stark Draper Lab., Inc. (USA) )

Miller, R.A.

Su, Q. ( SUNY/Binghamton (USA) )

Cui, W.

Gao, J.

2 more

Publication title:

Unattended ground sensor technologies and applications IV : 2-5 April 2002 Orland, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4743

Pub. Year:

2002

Page(from):

91

Page(to):

98

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444936 [0819444936]

Language:

English

Call no.:

P63600/4743

Type:

Conference Proceedings

Details

TDL ID:	ZA00012579
Series ID:	PA00000029
Conf. info. (Name):	Defense, Security, and Sensing : Unattended Ground Sensor Technologies and Applications
Conf. info. (Number):	2002 : 4th
Conf. info. (Venue):	Orland, FL, USA
Conf. info. (Date):	2002.04.02-2004.04.05

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