Blank Cover Image

Micromaterials Center Berlin: reliability research for MEmS (Keynote Paper)

Author(s):
Publication title:
Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4703
Pub. Year:
2002
Page(from):
114
Page(to):
119
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444516 [0819444510]
Language:
English
Call no.:
P63600/4703
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings International center for nano-materials reliability

Meyendorf, N., Michel, B.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings DMD reliability: a MEMS success story (Keynote Address)

Douglass, M.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Simulation of Random Crack Initiation,Growth,and Coalescence

Winkler,T., Michel,B., Vogt,H.

Trans Tech Publications
8 Conference Proceedings Role of interfacial properties on MEMS performance and reliability (Invited Paper)

de Boer, M. P., Knapp, J. A., Mayer, T. M., Michalske, T. A.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings AirJet paper mover: an example of mesoscale MEMS

Biegelsen,D.K., Berlin,A.A., Cheung,P., Fromherz,M., Goldberg,D., Jackson,W.B., Preas,B., Reich,J., Swartz,L.E.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings From optical MEMS to photonic crystal (Keynote Paper)

Lee, S.H., Kim, J.D., Lee, H.-S., Moon, I.-K., Won, J.H., Ku, J.N., Choi, H., Shin, H.J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Nanoscale deformation measurements to improve reliability assessment of sensors and MEMS [6179-19]

Michel, B., Keller, J., Walter, H.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings How to detect Edgar Allan Poe's 'purloined letter,' or cross-correlation algorithms in digitized video images for object identification, movement evaluation, …

Dost, M., Vogel, D., Winkler, T., Vogel, J., Erb, R., Kieselstein, E., Michel, B.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings MEMS-based micro instruments for in-situ planetary exploration (Keynote Paper)

George, T., Urgiles, E., Toda, R., Wilcox, J. Z., Douglas, S., Lee, C.-S., Son, K., Miller, D., Myung, N., Madsen, L., …

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Ultrasensitive detection and manipulation of biomolecules (Invited Paper)

Berlin, A. A., Su, X.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Photodetectors: UV to IR (Keynote Paper)

Campbell, J. C., Wang, S., Zheng, X., Li, X., Li, N., Ma, F., Sun, X., Collins, C. J., Beck, A. L., Yang, B., Hurst, J. …

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Optical MEMS-based arrays (Keynote Address)

Ruffin, P.B.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12