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Vertical electrostatic actuator with extended digital range via tailored topology

Author(s):
Publication title:
Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4700
Pub. Year:
2002
Page(from):
147
Page(to):
156
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444486 [0819444480]
Language:
English
Call no.:
P63600/4700
Type:
Conference Proceedings

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