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Design issues in SOI-based high-sensitivity piezoresistive cantilever devices

Author(s):
Kassegne, S. ( Nanogen, Inc. (USA) )
Madou, M.J.
Whitten, R.
Zoval, J.V.
Mather, E.
Sarkar, K.
Hodko, D.
Maity, S. ( Coventor, Inc. (USA) )
3 more
Publication title:
Smart structures and materials 2002 : modeling, signal processing, and control : 18-21 March 2002, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4693
Pub. Year:
2002
Page(from):
588
Page(to):
597
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444417 [0819444413]
Language:
English
Call no.:
P63600/4693
Type:
Conference Proceedings

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