Spectral metrologies for ultra-line-narrowed F2 laser | 東京工業大学附属図書館文献データベース

Blank Cover Image

Spectral metrologies for ultra-line-narrowed F2 laser

Author(s):

Nakaike, T. ( Association of Super- Advanced Electronics Technologies (Japan) )

Wakabayashi, O.

Publication title:

Optical Microlithography XV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4691

Pub. Year:

2002

Vol.:

Part Two

Page(from):

1714

Page(to):

1721

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444370 [0819444375]

Language:

English

Call no.:

P63600/4691

Type:

Conference Proceedings

Details

TDL ID:	ZA00012526
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2002 : 15th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2002.03.05-2002.03.08

Similar Items:

1 Conference Proceedings Spectral measurement of ultra line-narrowed F2 laser Wakabayashi,O., Sakuma,J., Suzuki,T., Kubo,H., Kitatochi,N., Suganuma,T., Nakaike,T., Kumazaki,T., Hotta,K., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge Enami,T., Wakabayashi,O., Nishisaka,T., Suzuki,N., Nire,T., Mizoguchi,H., Nakarai,H., Tanaka,H., Ariga,T., Shio,K., … SPIE-The International Society for Optical Engineering
2 Conference Proceedings Ultra-line-narrowed F2 laser for microlithography Komori,H., Ariga,T., Watanabe,H., Kumazaki,T., Kitatochi,N., Sasano,K., Ueno,Y., Nishisaka,T., Nohdomi,R., Hotta,K., … SPIE-The International Society for Optical Engineering	8 Conference Proceedings Long pulse duration of F2 laser for 157-nm lithography Watanabe,H., Kitatochi,N., Kakizaki,K., Tada,A., Sakuma,J., Ariga,T., Hotta,K. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Development of a 5-kHz ultra-line-narrowed F2 laser for dioptric projection systems Ariga, T., Watanabe, H., Kumazaki, T., Kitatochi, N., Sasano, K., Ueno, Y., Konishi, M., Suganuma, T., Nakano, M., … SPIE-The International Society for Optical Engineering	9 Conference Proceedings Ultra line narrowed injection lock laser light source for higher NA ArF immersion lithography tool T. Suzuki, K. Kakizaki, T. Matsunaga, S. Tanaka, Y. Kawasuji, M. Shimbori, M. Yoshino, T. Kumazaki, H. Umeda, H. Nagano, … SPIE - The International Society of Optical Engineering
4 Conference Proceedings Spectral dynamics analysis of utlra-line-narrowed F2 laser Kumazaki, T., Wakabayashi, O., Nohdomi, R., Ariga, T., Watanabe, H., Hotta, K., Mizoguchi, H., Tanaka, H., Takahashi, … SPIE-The International Society for Optical Engineering	10 Conference Proceedings Ultra line-narrowed ArF excimer laser G42A for sub-90-nm lithography generation Saito, T., Suzuki, T., Yoshino, M., Wakabayashi, O., Matsunaga, T., Fujimoto, J., Kakizaki, K., Yamazaki, T., Inoue, T., … SPIE-The International Society for Optical Engineering
5 Conference Proceedings Development of 5-kHz ultra-line-narrowed F2 laser for dioptric projection system Mizoguchi, H., Nohdomi, R., Ariga, T., Hotta, K., Nakao, K., Kasuya, K. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Development of high-power ArF/F2 laser platform for VUV microlithography Kakizaki, K., Fujimoto, J., Yamazaki, T., Suzuki, T., Matsunaga, T., Kawasuji, Y., Watanabe, Y., Kaminishi, M., Inoue, … SPIE - The International Society of Optical Engineering
6 Conference Proceedings Challenge of the F2 laser for dioptric projection system Ariga,T., Watanabe,H., Kumazaki,T., Kitatochi,N., Sasano,K., Ueno,Y., Nishisaka,T., Nohdomi,R., Hotta,K., Mizoguchi,H., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings High-resolution multigrating spectrometer for high-quality deep-UV light source production Suzuki,T., Nakaike,T., Wakabayashi,O., Mizoguchi,H. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12