In-situ measurements of VUV optical materials for F2 laser
- Author(s):
Sumitani, A. ( Komatsu Ltd. (Japan) ) Itakura, Y. Yoshida, F. Kawasa, Y. Zhang, J. Kanda, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Itani, T. - Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 1686
- Page(to):
- 1695
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Development and evaluation of an F2 laser for immersion interference lithography at 157 nm
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Evaluation of characteristics of VUV optical materials irradiated by F2 laser
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Evaluation of characteristics of VUV optical materials irradiated by F2 laser
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
1-kHz 5-W ArF excimer laser for microlithography with highly narrow 0.7-pm bandwidth and issues on durability related to optical damage
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Present status of development of gas-purging and chemically clean technologies at ASET
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Development of environmental control technologies for 157-nm lithography at ASET
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |