Defect printability and specification of ArF mask in repeating feature
- Author(s):
- Kim, W.-H. ( Hynix Semiconductor Inc. (Korea) )
- Ma, W.-K.
- Kim, H.-B.
- Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 1357
- Page(to):
- 1365
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Phase defect printability of alternating phase shift masks for ArF lithography
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Specification of the phase angle of a 6% attenuated PSM mask used in ArF lithography
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Comparative study of chromeless and attenuated phase shift mask for 0.3-k1 ArF lithography of DRAM
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Defect printability of ArF alternative phase-shift mask: a critical comparison of simulation and experiment
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Required performances of reticle inspection sysytem for ArF lithography through analysis of defect printability study
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Deteclability and printability of EUVL mask blank defects for the 32-nm HP node
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Printability of substrate and absorber defects on extreme ultraviolet lithographic masks
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |