Development of a 5-kHz ultra-line-narrowed F2 laser for dioptric projection systems
- Author(s):
Ariga, T. ( Association of Super-Advanced Electronics Technologies (Japan) ) Watanabe, H. Kumazaki, T. Kitatochi, N. Sasano, K. Ueno, Y. Konishi, M. Suganuma, T. Nakano, M. Yamashita, T. Nishisaka, T. Nohdomi, R. Hotta, K. Mizoguchi, H. Nakao, K. - Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 652
- Page(to):
- 659
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
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